Raman and Rutherford backscattering analyses of cubic SiC thin films grown on Si by vertical chemical vapor deposition

Author： Feng Z.C.   Tin C.C.   Hu R.   Williams J.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.266, Iss.1, 1995-09, pp. : 1-7

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