The formation of sputtered Ta/a-Si and a-Si/Ta interfaces in a-Si/Ta/a-Si/c-Si structure

Author: Ijdiyaou Y.   Hafidi K.   Azizan M.   Ameziane E.L.   Patrat G.   Brunel M.   Ortega L.   Tan T.A.N.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.266, Iss.2, 1995-10, pp. : 224-228

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Abstract