Influence of surface carbon on the formation of silicon-refractory metal interfaces

Author: Gall N.R.   Rut'kov E.V.   Tontegode A.Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.266, Iss.2, 1995-10, pp. : 229-233

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Abstract