Influence of nitrogen doping on different properties of a-C:H

Author: Hauert R.   Glisenti A.   Metin S.   Goitia J.   Kaufman J.H.   Van Loosdrecht P.H.M.   Kellock A.   Hoffmann P.   White R.L.   Hermsmeier B.D.   Kellock A.J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.268, Iss.1, 1995-11, pp. : 22-29

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Abstract