Structural and optical characterization of -FeSi 2 layers on Si formed by ion beam synthesis

Author： Kobayashi N. Katsumata H. Shen H.L. Hasegawa M. Makita Y. Shibata H. Kimura S. Obara A. Uekusa S. Hatano T.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.270, Iss.1, 1995-12, pp. : 406-410

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