Heteroepitaxial Si 1-x-y Ge x C y films on (100)Si substrates for future low-power applications

Author: Alford T.L.   Bair A.E.   Atzmon Z.   Stout L.M.   Balster S.G.   Schroder D.K.   Roedel R.J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.270, Iss.1, 1995-12, pp. : 632-636

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Abstract