Recent developments in ionized cluster beam thin film deposition

Author: Cox A.J.   Nainaparampil J.J.   Tabet M.F.   Hosseini-Tehrani A.   Urban F.K.   Urban F.K.I.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.270, Iss.1, 1995-12, pp. : 637-642

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Abstract