Anisotropy micro-ellipsometry for in-situ determination of optical and crystallographic properties of anisotropic solids and layers with Ti/TiO 2 as an example

Author: Michaelis A.   Schultze J.W.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.274, Iss.1, 1996-03, pp. : 82-94

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Abstract