Influence of microstructure on residual stress in tungsten thin films analyzed by X-ray diffraction

Author: Durand N.   Badawi K.F.   Goudeau P.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.275, Iss.1, 1996-04, pp. : 168-171

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Abstract