Metallisation of porous silicon by chemical vapour infiltration and deposition

Author: Aylett B.J.   Harding I.S.   Earwaker L.G.   Forcey K.   Giaddui T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.276, Iss.1, 1996-04, pp. : 253-256

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Abstract