Infrared kinetic study of ultrathin SIC buffer layers grown on Si(100) by reactive chemical vapour deposition

Author: Ferro G.   Monteil Y.   Vincent H.   Cauwet F.   Bouix J.   Durupt P.   Bisaro R.   Olivier J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.278, Iss.1, 1996-05, pp. : 22-27

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