Properties of indium tin oxide films with indium tin modulation layers prepared by nano-scale controlled reactive magnetron sputtering

Author： Takashima Y. Sasaki K. Hata T. Zahirul Alam A.H.M.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.279, Iss.1, 1996-06, pp. : 131-134

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