Improvement of the crystallinity of GaAs epitaxial layers grown on Si substrates assisted by electron beam irradiation

Author: Kang T.W.   Woo Y.D.   Kim T.W.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.279, Iss.1, 1996-06, pp. : 14-16

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Abstract