Effects of process parameters on titanium dioxide thin film deposited using ECR MOCVD

Author: Lee J.S.   Song H.W.   Lee W.J.   Yu B.G.   No K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.287, Iss.1, 1996-10, pp. : 120-124

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Abstract