Influence of the process parameters on the properties of hydrogenated amorphous carbon thin films deposited using ECR plasma

Author: Piazza F.   Arnal Y.   Grambole D.   Herrmann F.   Kildemo M.   Lacoste A.   Relihan G.   Golanski A.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.383, Iss.1, 2001-02, pp. : 196-199

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Abstract