Young's modulus of RF-sputtered amorphous thin films in the SiO 2 -Y 2 O 3 system at high temperature

Author： Shinoda T. Soga N. Hanada T. Tanabe S.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.293, Iss.1, 1997-01, pp. : 144-148

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