Lattice distortion in dry-etched Si/SiGe quantum dot array studied by 2D reciprocal space mapping using synchrotron X-ray diffraction

Author： Ni W.-X.   Birch J.   Joelsson K.B.   Hansson G.V.   Tang Y.S.   Sotomayor-Torres C.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.294, Iss.1, 1997-02, pp. : 300-303

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