Structure and composition studies for silicon nitride thin films deposited by single ion bean sputter deposition

Author： Huang L.   Hipps K.W.   Dickinson J.T.   Mazur U.   Wang X.D.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.299, Iss.1, 1997-05, pp. : 104-109

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