Formation of WSi-based ohmic contacts to n-type GaAs

Author： Oku T.   Furumai M.   Uchibori C.J.   Murakami M.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.300, Iss.1, 1997-05, pp. : 218-222

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