Characteristics of ZnO thin films deposited onto Al/Si substrates by r.f. magnetron sputtering

Author: Ki H.Y.   Choi J.-W.   Lee D.-H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.302, Iss.1, 1997-06, pp. : 116-121

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