Three-dimensional morphological instabilities in chemical vapor deposition films

Author: Hwang C.-C.   Dai Y.-M.   Yang H.-Y.   Hsieh J.-Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.304, Iss.1, 1997-07, pp. : 371-380

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Abstract