Deposition of Iridium Thin Films on Three‐Dimensional Structures With PE‐MOCVD

E-ISSN： 1521-3862|21|1-2-3|46-53

ISSN： 0948-1907

Source： CHEMICAL VAPOR DEPOSITION (ELECTRONIC), Vol.21, Iss.1-2-3, 2015-03, pp. : 46-53

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