Vapor deposition of polyimide: Segregation of partially reacted species at the polyimide/Si (100) interface

Author： Liberman V. Malba V. Bernhardt A.F.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.305, Iss.1, 1997-08, pp. : 26-29

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