Author： Yudasaka M. Kikuchi R. Matsui T. Ohki Y. Baxendale R. Yoshimura S. Ota E.
Publisher： Elsevier
ISSN： 0040-6090
Source： Thin Solid Films, Vol.305, Iss.1, 1997-08, pp. : 351-357
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Graphite formation on Ni film by chemical vapor deposition
By Yudasaka M. Kikuchi R. Matsui T. Ohki Y. Baxendale M. Yoshimura S. Ota E.
Thin Solid Films, Vol. 280, Iss. 1, 1996-07 ,pp. :
Access to resources
Recommend
Combustion chemical vapor deposition of CeO 2 film
By Carter W.B. Book G.W. Polley T.A. Stollberg D.W. Hampikian J.M.
Thin Solid Films, Vol. 347, Iss. 1, 1999-06 ,pp. :
Thin-film transistors deposited by hot-wire chemical vapor deposition
By Stannowski B. Rath J.K. Schropp R.E.I.
Thin Solid Films, Vol. 430, Iss. 1, 2003-04 ,pp. :
Al 2 O 3 formation on Si by catalytic chemical vapor deposition
By Ogita Y.-I. Iehara S. Tomita T.
Thin Solid Films, Vol. 430, Iss. 1, 2003-04 ,pp. :