Influence of conventional furnace and rapid thermal annealing on the quality of polycrystalline -FeSi 2 thin films grown from vapor-deposited Fe/Si multilayers

Author: Tassis D.H.   Dimitriadis C.A.   Boultadakis S.   Arvanitidis J.   Ves S.   Kokkou S.   Valassiades O.   Logothetidis S.   Poulopoulos P.   Flevaris N.K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.310, Iss.1, 1997-11, pp. : 115-122

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract