Large-grain polycrystalline silicon thin films obtained by low-temperature stepwise annealing of hydrogenated amorphous silicon

Author： Dytlewski N. Ruther R. Livingstone J.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.310, Iss.1, 1997-11, pp. : 67-74

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