Author： Carrillo-Lopez J. Morales-Acevedo A.
Publisher： Elsevier
ISSN： 0040-6090
Source： Thin Solid Films, Vol.311, Iss.1, 1997-12, pp. : 38-43
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
IR and Raman absorption spectroscopic studies of APCVD, LPCVD and PECVD thin SiN films
By Beshkov G. Lei S. Lazarova V. Nedev N. Georgiev S.S.
Vacuum, Vol. 69, Iss. 1, 2002-12 ,pp. :
Access to resources
Recommend
Auger electron spectroscopy study of SiC thin films deposited on silicon
By Lei Y.M. Yu Y.H. Cheng L.L. Ren C.X. Zou S.C.
Vacuum, Vol. 58, Iss. 4, 2000-09 ,pp. :
Infrared characterisation of evaporated SiO thin films
Thin Solid Films, Vol. 416, Iss. 1, 2002-09 ,pp. :