Spectroscopic ellipsometry studies of tetrahedral amorphous carbon prepared by filtered cathodic vacuum arc technique

Author: Xu S.   Cheah L.K.   Tay B.K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.312, Iss.1, 1998-01, pp. : 160-169

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract