Optical characterization by spectroscopic ellipsometry of polycrystalline Si 1-x Ge x of variable Ge composition up to 100% Ge

Author: Ferrieu F.   Morin C.   Regolini J.L.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.315, Iss.1, 1998-03, pp. : 316-321

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Abstract