Bias enhanced nucleation and bias textured growth of diamond on silicon(100) in hot filament chemical vapor deposition

Author： Huang J.T.   Yeh W.Y.   Hwang J.   Chang H.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.315, Iss.1, 1998-03, pp. : 35-39

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