Investigation of the amorphous to microcrystalline phase transition of thin film silicon produced by PECVD

Author: Martins R.   Macarico A.   Ferreira I.   Nunes R.   Bicho A.   Fortunato E.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.317, Iss.1, 1998-04, pp. : 144-148

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