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Elsevier

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Thickness change in an annealed amorphous silicon film detected by spectroscopic ellipsometry

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Investigation of the amorphous to microcrystalline phase transition of thin film silicon produced by PECVD

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Stability of plasma deposited thin film transistors - comparison of amorphous and microcrystalline silicon

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Structural properties of microcrystalline silicon in the transition from highly crystalline to amorphous growth

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