Investigation of ion beam mixing effects in Ta/Pd bilayers deposited on Si

Author: Bibic N.   Milosavljevic M.   Perusko D.   Jeynes C.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.317, Iss.1, 1998-04, pp. : 274-277

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Abstract