Transparent and conducting ZnO(:Al) films deposited by simultaneous RF- and DC-excitation of a magnetron

Author: Ellmer K.   Cebulla R.   Wendt R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.317, Iss.1, 1998-04, pp. : 413-416

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Abstract