Investigation of inhomogeneous structures of near-surface-layers in ion-implanted silicon

Author： Swiatek Z.   Bonarski J.T.   Ciach R.   Kuznicki Z.T.   Fodchuk I.M.   Raransky M.D.   Gorley P.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.319, Iss.1, 1998-04, pp. : 39-43

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