RBS/channeling studies on the heteroepitaxially grown Y 2 O 3 film on Si(100)

Author： Whang C.N. Kim H.B. Cho M.H. Whangbo S.W. Choi S.C. Choi W.K. Song J.H. Kim S.O.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.320, Iss.2, 1998-05, pp. : 169-172

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