Quantitative secondary ion mass spectrometry analysis of SiO 2 desorption during in situ heat cleaning

Author: Kasper E.   Bauer M.   Oehme M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.321, Iss.1, 1998-05, pp. : 148-152

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Abstract