Optimization of growth conditions for strained Si/Si 1-y C y structures

Author: Joelsson K.B.   Ni W.-X.   Pozina G.   Hultman L.   Hansson G.V.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.321, Iss.1, 1998-05, pp. : 15-20

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Abstract