Structural characterization of a UHV/CVD-grown SiGe HBT with graded base

Author: Dion M.   Houghton D.C.   Rowell N.L.   Perovic D.D.   Aers G.C.   Rolfe S.J.   Sproule G.I.   Phillips J.R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.321, Iss.1, 1998-05, pp. : 167-171

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Abstract