Epitaxial growth with phosphorus - 4. Application of dichloro-t-butylphosphine to CVD processes: the thermal chemical vapor deposition formation of copper phosphide thin films and etching of indium phosphide by dichloro-t-butylphosphine [1]

Author： Glass J.A.   Spencer J.T.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.322, Iss.1, 1998-06, pp. : 138-142

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