Epitaxial growth of RuO 2 thin films by metal-organic chemical vapor deposition

Author: Lu P.   He S.   Li F.X.   Jia Q.X.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.340, Iss.1, 1999-02, pp. : 140-144

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Abstract