Preparation of SiO 2 films with embedded Si nanocrystals by reactive r.f. magnetron sputtering

Author: Seifarth H.   Grotzschel R.   Markwitz A.   Matz W.   Nitzsche P.   Rebohle L.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.330, Iss.2, 1998-09, pp. : 202-205

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Abstract