Uncooled thin film infrared imaging device with aerogel thermal isolation: deposition and planarization techniques

Author： Ruffner J.A.   Clem P.G.   Tuttle B.A.   Brinker C.J.   Sriram C.S.   Bullington J.A.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.332, Iss.1, 1998-11, pp. : 356-361

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