A new formula on the thickness of films deposited by planar and cylindrical magnetron sputtering

Author: Meng X.Q.   Fan X.J.   Guo H.X.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.335, Iss.1, 1998-11, pp. : 279-283

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Abstract