RHEED investigation of limiting thickness epitaxy during low-temperature Si-MBE on (100) surface

Author: Nikiforov A.I.   Kanter B.Z.   Pchelyakov O.P.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.336, Iss.1, 1998-12, pp. : 179-182

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Abstract