Metastable phase diagram of Ti-Si-N(O) films (C Si <30 at.%)

Author: Shalaeva E.V.   Borisov S.V.   Denisov O.F.   Kuznetsov M.V.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.339, Iss.1, 1999-02, pp. : 129-136

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