Electrical properties of nitrogen incorporated tetrahedral amorphous carbon films

Author: Chen Z.Y.   Yu Y.H.   Zhao J.P.   Yang S.Q.   Shi T.S.   Liu X.H.   Luo E.Z.   Xu J.B.   Wilson I.H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.339, Iss.1, 1999-02, pp. : 74-77

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Abstract