Electrical stability of polyimide siloxane films for interlayer dielectrics in multilevel interconnections

Author： Homma T. Yamaguchi M. Kutsuzawa Y. Otsuka N.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.340, Iss.1, 1999-02, pp. : 237-241

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