Effects of the power of electron shower and substrate bias on the synthesis of cementite films

Author: Li S.J.   Yumoto H.   Shimotomai M.   Ishihara M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.345, Iss.1, 1999-05, pp. : 23-28

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Abstract