Gas-phase diagnosis and high-rate growth of stable a-Si:H

Author: Takagi T.   Hayashi R.   Ganguly G.   Kondo M.   Matsuda A.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.345, Iss.1, 1999-05, pp. : 75-79

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Abstract